Tech
Next-Gen EUV Lithography: Samsung Decides
Meng Li · chippub
Aug 11, 2026 · 1 min listen · Last updated August 11, 2026
Samsung Electronics is pursuing innovation in lithography technology, starting from the 1-nanometer (nm) process, with commercialization expected as early as 2030. The company plans to apply the next-generation extreme ultraviolet (EUV) technology—“High Numerical Aperture Extreme Ultraviolet (High-NA EUV)”—to the mass production of the 1nm process and is currently focusing on the development of commercialization technologies.
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